News Archive

[February 24-28, 2013]


Please attend the technical conference to hear about JCMwave's co-presentations about "Fast simulation method for parameter reconstruction in optical metrology" (8681-75, Session PS1, with PTB, ZIB)," Accurate real-time optical modeling of 3D masks and nanostructures" (8681-102, Session PS1) and "Topographic mask modeling with reduced-basis finite element method" (8683-47, Session 11, with Nikon). Technical summaries are also available here.