Square Unit Cell¶

This is a simple example of a 2D grating with a twofold periodic square lattice. The 3D unit cell is periodic in $x-$ and $y-$ direction. It contains a rhomboid (parallelepiped) situated on a substrate and surrounded by a background material. The materials in the example are chosen as chrome (rhomboid), glass (substrate) and air (background).

The grating is illuminated by plane waves with $s$ and $p$ polarization. JCMsuite computes the near field distributions. The following figures show the near-field intensities within the structure for perpendicular plane wave incidence from the substrate side at a wavelength of $193\mathrm{nm}$ .

Field vectors for $s$ -polarized illumination¶

Field vectors for $p$ -polarized illumination¶

The post process FourierTransform computes the amplitudes of the transmitted diffraction orders.

Parameter scan

The Matlab® script data_analysis/run_scan_illumination.m provides a scan over the incidence angle. It produces the following plots showing the intensities for reflected and transmitted diffraction orders:

_images/transmission_reflectivity_versus_illumination.png

In the script data_analysis/run_scan_width.m the width of the pattern varies from $150 \mathrm{nm}$ to $250 \mathrm{nm}$ with fixed illumination angle. This yields the following dependencies:

_images/transmission_reflectivity_versus_pattern_width.png