Blazed Grating¶

This is a variation of the example for a 1D periodic line grating Line Grating. It is inspired by blazed gratings. As in the case of the 1D line, the periodic unit cell contains the 2D cross-section through the grating. Here the cross-section contains two triangular shapes with different widths, heights and angles. These triangular lines are situated on a substrate and surrounded by a background material. The materials in the example are chosen as chrome (line), glass (substrate) and air (background).

The grating is illuminated by plane waves with $s$ and $p$ polarization. JCMsuite computes the near field distributions. The following figures show the near-field intensities within the structure for perpendicular plane wave incidence from the substrate side at a wavelength of $193\mathrm{nm}$ .

Near field intensity for $s$ -polarized illumination¶

Near field intensity for $p$ -polarized illumination¶

The post process FourierTransform computes the amplitudes of the transmitted diffraction orders.

Parameter scan

The Matlab® script data_analysis/run_scan_illumination.m provides a scan over the incidence angle at fixed grating height and angle. It produces the following plots showing the intensities for reflected and transmitted diffraction orders:

_images/transmission_reflectivity_versus_illumination1.png

In the script data_analysis/run_scan_height.m the height of one of the triangular lines is varied from $50 \mathrm{nm}$ to $120 \mathrm{nm}$ at a fixed illumination angle. This yields the following height dependencies:

_images/transmission_reflectivity_versus_height.png