JCMsuite has been used in a simulation study to assess the performance of coherent diffractive imaging (CDI) and related phase retrieval methods for the reconstruction of non-trivially shaped and a–periodic nanostructures from far field intensity data.

P. Ansuinelli, et al. EUV mask feature reconstruction via phase retrieval.Proc. SPIE 11089, 110892F (2019).

DOI: 10.1117/12.2525976