Displaying items by tag: optical metrology and sensing

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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Published in 2018

Metrology of nanoscale grating structures by UV scatterometry

Published in 2017

Investigating surface structures by EUV scattering

Published in 2017

Whispering gallery mode lasers for sensing applications

Published in 2017

Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Published in 2017

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Published in 2017

FEM for validation of alternative scattering computation method.

Published in 2017

Modeling of Optical Imaging of Finite Multi-Line Arrays.

Published in 2016

Quantitative optical imaging for in-die-capable critical dimension targets

Published in 2016

Design of a plasmonic near-field tip for super-resolution IR-imaging

Published in 2016

Crescent-Shaped Metal Nanoparticles for Sensing Applications

Published in 2009

Benchmark of computational methods for mask simulation in optical lithography

Published in 2005

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