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JCMsuite Applications in R&D
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optical metrology and sensing
Displaying items by tag: optical metrology and sensing
Self-Assembly of Plasmonic Nanoantenna-Waveguide Structures for Subdiffractional Chiral Sensing
Published in
2020
Tagged under
optical chirality
optical resonators and antennas
plasmonics
optical metrology and sensing
light scattering computation
Read more...
Inverted plasmonic lens design for nanometrology applications
Published in
2020
Tagged under
diffractive optics
plasmonics
optical metrology and sensing
light scattering computation
Read more...
Scanning tunneling microscopy for probing the dielectric response of metals at the atomic scale
Published in
2020
Tagged under
optical metrology and sensing
optical resonators and antennas
light scattering computation
Read more...
Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules
Published in
2020
Tagged under
optical chirality
optical metrology and sensing
light scattering computation
Read more...
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Published in
2018
Tagged under
optical metrology and sensing
optical and EUV lithography
light scattering computation
optimization and parameter retrieval methods
Read more...
Metrology of nanoscale grating structures by UV scatterometry
Published in
2017
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
Read more...
Investigating surface structures by EUV scattering
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Whispering gallery mode lasers for sensing applications
Published in
2017
Tagged under
light sources
optical metrology and sensing
optical resonators and antennas
resonance mode computation
Read more...
Evaluating the effects of modeling errors for isolated finite three-dimensional targets
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Published in
2017
Tagged under
optical metrology and sensing
other fields
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
light scattering computation
Read more...
FEM for validation of alternative scattering computation method
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
other fields
software benchmarks
light scattering computation
Read more...
Modeling of Optical Imaging of Finite Multi-Line Arrays
Published in
2016
Tagged under
optical and EUV lithography
optical metrology and sensing
light scattering computation
other methods
Read more...
Quantitative optical imaging for in-die-capable critical dimension targets
Published in
2016
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Design of a plasmonic near-field tip for super-resolution IR-imaging
Published in
2016
Tagged under
plasmonics
optical metrology and sensing
photonic waveguides and fibers
light scattering computation
Read more...
Efficient Bayesian inversion for shape reconstruction of lithography masks
Published in
2010
Tagged under
optical metrology and sensing
optical and EUV lithography
uncertainty quantification methods
optimization and parameter retrieval methods
light scattering computation
Read more...
Crescent-Shaped Metal Nanoparticles for Sensing Applications
Published in
2009
Tagged under
optical metrology and sensing
plasmonics
light scattering computation
Read more...
Benchmark of computational methods for mask simulation in optical lithography
Published in
2005
Tagged under
optical metrology and sensing
optical and EUV lithography
software benchmarks
Read more...
JCMsuite used for Mueller matrix ellipsometry
Published in
2019
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
software benchmarks
Read more...
Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
metamaterials
quantum optics
optimization and parameter retrieval methods
software benchmarks
Read more...
Gaussian process regression for efficient parameter reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
software benchmarks
Read more...
EUV mask feature reconstruction via phase retrieval
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
light scattering computation
Read more...
Grazing incidence x-ray fluorescence based profile reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
advanced finite element methods
Read more...
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