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JCMsuite Applications in R&D
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optimization and parameter retrieval methods
Displaying items by tag: optimization and parameter retrieval methods
Opportunities of polarization-resolved EUV scatterometry on photomasks
Published in
2023
Tagged under
optical and EUV lithography
optimization and parameter retrieval methods
Read more...
Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry
Published in
2023
Tagged under
optical metrology and sensing
plasmonics
optimization and parameter retrieval methods
Read more...
Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions
Published in
2023
Tagged under
integrated optics
optical and EUV lithography
optical metrology and sensing
optimization and parameter retrieval methods
Read more...
Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
Published in
2023
Tagged under
optical and EUV lithography
optimization and parameter retrieval methods
light scattering computation
Read more...
Pushing the boundaries of EUV scatterometry reconstruction of complex nanostructures for next-generation transistor technology
Published in
2023
Tagged under
optical and EUV lithography
optical metrology and sensing
optimization and parameter retrieval methods
Read more...
Challenges of Grazing Emission X-ray Fluorescence GEXRF for the Characterization of Advanced Nanostructured Surfaces
Published in
2022
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
light scattering computation
Read more...
Numerical optimization of single-mode fiber-coupled single-photon sources based on semiconductor quantum dots
Published in
2022
Tagged under
light sources
quantum optics
optimization and parameter retrieval methods
light scattering computation
Read more...
Compact Plug and Play Optical Frequency Reference Device Based on Doppler-free Spectroscopy of Rubidium Vapor
Published in
2022
Tagged under
quantum optics
other fields
optimization and parameter retrieval methods
Read more...
Eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators
Published in
2022
Tagged under
optical resonators and antennas
resonance mode computation
optimization and parameter retrieval methods
advanced finite element methods
Read more...
Machine learning enhanced in situ electron beam lithography of photonic nanostructures
Published in
2022
Tagged under
quantum optics
optical resonators and antennas
integrated optics
light sources
optimization and parameter retrieval methods
Read more...
Electromagnetically Chiral Scatterers at Optical Frequencies
Published in
2022
Tagged under
optical chirality
plasmonics
optimization and parameter retrieval methods
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Bayesian Target-Vector Optimization for Efficient ParameterReconstruction
Published in
2022
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Nano-optical Designs for High-efficiency Monolithic Perovskitesilicon Tandem Solar Cells
Published in
2022
Tagged under
photovoltaics
optimization and parameter retrieval methods
light scattering computation
Read more...
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Published in
2021
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
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Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Published in
2021
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Optimized diamond inverted nanocones for enhanced color center to fiber coupling
Published in
2021
Tagged under
light sources
quantum optics
light scattering computation
propagation mode computation
optimization and parameter retrieval methods
Read more...
Bayesian optimization of metal grating back reflectors for multijunction solar cells
Published in
2021
Tagged under
photovoltaics
plasmonics
diffractive optics
light scattering computation
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures
Published in
2021
Tagged under
integrated optics
all
optimization and parameter retrieval methods
light scattering computation
Read more...
Deterministically fabricated spectrally-tunable quantum dot based single-photon source
Published in
2020
Tagged under
quantum optics
light sources
integrated optics
light scattering computation
optimization and parameter retrieval methods
Read more...
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Published in
2018
Tagged under
optical metrology and sensing
optical and EUV lithography
light scattering computation
optimization and parameter retrieval methods
Read more...
Optimization of free-form shapes using a global optimization method
Published in
2018
Tagged under
metamaterials
diffractive optics
optimization and parameter retrieval methods
Read more...
Metrology of nanoscale grating structures by UV scatterometry
Published in
2017
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
Read more...
Investigating surface structures by EUV scattering
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Evaluating the effects of modeling errors for isolated finite three-dimensional targets
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Published in
2017
Tagged under
optical metrology and sensing
other fields
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
light scattering computation
Read more...
Quantitative optical imaging for in-die-capable critical dimension targets
Published in
2016
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Fiber grating couplers on SOI
Published in
2014
Tagged under
integrated optics
diffractive optics
optimization and parameter retrieval methods
Read more...
Efficient Bayesian inversion for shape reconstruction of lithography masks
Published in
2010
Tagged under
optical metrology and sensing
optical and EUV lithography
uncertainty quantification methods
optimization and parameter retrieval methods
light scattering computation
Read more...
JCMsuite used for Mueller matrix ellipsometry
Published in
2019
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
software benchmarks
Read more...
Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
metamaterials
quantum optics
optimization and parameter retrieval methods
software benchmarks
Read more...
Gaussian process regression for efficient parameter reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
software benchmarks
Read more...
Grazing incidence x-ray fluorescence based profile reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
advanced finite element methods
Read more...
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