Latent Image Characterization by Spectroscopic Reflectometry in the Extreme Ultraviolet

The application of spectroscopic EUV reflectometry for characterizing the latent image of a line grating is investigated. Numerical simulations with JCMsuite are performed to compute the reflectance of latent images of line gratings and simulations to analyze latent image gratings with a surface topography.

S. Schröder, et al. Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet. J Micro Nanolithogr MEMS MOEMS, 21, 021208-021208 (2022).

DOI: 10.1117/1.JMM.21.2.021208