To build a reliable simulation tool for confocal microscopes, numerical studies with different software are performed and compared, one of them JCMsuite. Here, a line grating is investigated and the concept of the image formation method is presented.

S. Wyss, et al. Rigorous modeling of a confocal microscope. Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190Q (2023).

DOI: 10.1117/12.2673784