A coherent illumination model for scattering of focused beams such as Gaussian- and Bessel beams by periodic structures such as line gratings is presented. The model is then compared with strategies implemented on large-scale super-cells and inverse Floquet-transform strategies to superimpose both near- and far fields coherently.
M. Hammerschmidt, et al. Forward simulation of coherent beams on grating structures for coherent scatterometry. Proc. SPIE PC12619, PC1261907 (2023).
DOI: 0.1117/12.2673231