In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The numerical simulations with JCMsuite and the measurements from BESSY II synchrotron radiation facility are in excellent agreement.
S. Staeck, et al. Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples. Nanomaterials, 12, 3766 (2022).
DOI: 10.3390/nano12213766