A compact source of extreme ultraviolet (EUV) for the characterization of samples in the EUV spectral range is presented and compared to a reference measurement with synchroton radiation. For the parameter reconstruction from the scattering data, numerical simulations with JCMsuite are performed with determined accuracy.
L. M. Lohr, et al. Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation, Appl. Opt., 62, 117 (2023).
DOI: 10.1364/AO.475566