This study uses scanning-free grazing emission x-ray fluorescence (GEXRF) to characterize periodic HfO₂/TiO₂ nanogratings. To reconstruct the nanostructure geometry from measured fluorescence intensity maps, the expected fluorescence intensities were simulated using a finite element method (FEM) model implemented in JCMsuite. The simulations enabled discrimination of subtle etch-induced geometric differences between sample positions, validating GEXRF as a non-destructive metrology tool for buried nanoscale features.
N. Wauschkuhn, et al. Characterization and discrimination of periodic nanostructures with scanning-free GEXRF. Nanotechnology 36, 235701 (2025).