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Home
Logo Position
JCMsuite
Application Areas
Technology
Modules and Interfaces
Getting started
JCMsuite Applications in R&D
Documentation
Services
Consulting
Support
Training
Company
About
Contact
Projects
Blog
Displaying items by tag: uncertainty quantification methods
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Published in
2021
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Bayesian optimization of metal grating back reflectors for multijunction solar cells
Published in
2021
Tagged under
photovoltaics
plasmonics
diffractive optics
light scattering computation
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Investigating surface structures by EUV scattering
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Published in
2017
Tagged under
optical metrology and sensing
other fields
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
light scattering computation
Read more...
Efficient Bayesian inversion for shape reconstruction of lithography masks
Published in
2010
Tagged under
optical metrology and sensing
optical and EUV lithography
uncertainty quantification methods
optimization and parameter retrieval methods
light scattering computation
Read more...
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