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Home
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JCMsuite
Application Areas
Technology
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JCMsuite Applications in R&D
Documentation
Services
Consulting
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Training
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Contact
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Displaying items by tag: uncertainty quantification methods
Investigating surface structures by EUV scattering
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Published in
2017
Tagged under
optical metrology and sensing
other fields
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
light scattering computation
Read more...
Efficient Bayesian inversion for shape reconstruction of lithography masks
Published in
2010
Tagged under
optical metrology and sensing
optical and EUV lithography
uncertainty quantification methods
optimization and parameter retrieval methods
light scattering computation
Read more...
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