The angular resolved fluorescence signal from a grazing incidence X-ray illumination of periodic nanostructures is used to reconstruct its geometry parameters. The parameter reconstruction using JCMsuite is based on a finite-element model of the scattering and fluorescence process as well as an efficient Bayesian minimization of the disagreement between the simulated and the measured fluorescence signal.
A. Andrle, et al. Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning. Nanomaterials, 11, 7 (2021).