An exploration of soft X-ray and EUV-scatterometry from grazing to near normal incidence is presented. Measurements are performed on e-beam written silicon gratings. The reconstructed geometrical line shape models are statistically validated by applying a Markov-Chain Monte Carlo sampling technique. Experimental data and simulation results provide insight into the potential of EUV scatterometry.

V. Soltwisch, et al. Investigating surface structures by EUV scattering. Proc. SPIE 10143, 101430P (2017).

DOI: 10.1117/12.2258044