EUV scatterometry measurements and data evaluation on next-generation transistor candidates, the forksheet structures, are presented. The measure of EUV radiation is performed in PTB's compact measurement chamber at the X-ray beamline at BESSY II and the reconstruction of geometry data is performed by Scattering simulations computed with JCMsuite and numerical optimization scheme.

R. Ciesielski, et al. Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology. Proc. SPIE, 447 (2023).

DOI: 10.1117/12.2658501