A new model-based evaluation method for optical bidirectional measurements, such as linewidth determination on micro- and nanostructures, was developed. JCMsuite's rigorous finite element method (FEM) solver was used to simulate the microscope imaging process, incorporating a modified Hopkins' approximation for computational efficiency. The simulated and measured intensity profiles were compared within a Bayesian Target Vector Optimization (BTVO) framework, also provided by JCMwave, to reconstruct the linewidth and other parameters with high accuracy.
J. Krüger, et al. Introduction and application of a new approach for model-based optical bidirectional measurements. Meas. Sci. Technol., 35, 085014 (2024).