This work investigates spectroscopic ellipsometry for dimensional metrology and sensing of gold plasmonic gratings. JCMsuite's finite element method (FEM) solver was used to design the gratings by maximizing the sensitivity of ellipsometric parameters and to simulate their optical response. The accurate FEM simulations were also crucial for calculating the limits of detection (LOD) for grating dimensions and refractive index sensing, identifying regions of sub-picometer sensitivity.
D. Mukherjee, et al. Spectroscopic Ellipsometry of Plasmonic Gratings: Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty. ACS Omega, 10, 14466 (2025).