This work demonstrates the non-destructive characterization of periodic TiO₂ nanogratings using laboratory-based scanning-free grazing-emission X-ray fluorescence (GEXRF) in the tender X-ray range. The angularly resolved fluorescence emission patterns were simulated using the finite-element Maxwell solver from JCMwave to model the electric field distribution and X-ray standing wave effects within the nanostructures. JCMsuite was essential for both validating the measured data against known sample parameters and performing a Bayesian-optimized reconstruction of the nanograting geometry from the experimental GEXRF maps.
S. Staeck, et al. Investigation of Ti nanostructures via laboratory scanning-free GEXRF. Nanoscale, 17, 3411 (2025).
DOI: 10.1039/d4nr02445a